HL-Planartechnik GmbH offers a wide range of products in planar microstructures for automotive, medical, household and industrial appliances since 1988. With services ranging from standard components up to a complete solution for customer specific tasks, we can offer the customer access to a whole range of microsystem technologies.
HL-Planartechnik`s Foundry Service charter is to identify customized products and to obtain and refine the competence of the technology. In this way it is possible to develop and produce application specific products. The Foundry Service is based on our proven, standard MEMS technologies. Using our wafer technology with its micro-structured techniques, state-of-the-art equipment and production experience, HL-Planartechnik GmbH can develop an individual solution for every customer.
Applications
membranes
silicon structures
waveguides
cavities
mirrors
heaters
electrodes
protective coatings
Your Benefits
individually developed and application specific products
qualified processes
complete documentation
high volume production
low cost
Key Features
4'' and 6'' wafer technology
professional process control & characterization
ISO/TS conforming production
Technology offer
HL-Planartechik GmbH offers its MST technology process for building functional elements or blocks on wafers up to 6" size as foundry service. The elements may consist of silicon / siliconoxinitride and metallic microstructures.
The functionality covers the whole range from
mechanical (i.e. switches, actors, guidances) to
electronical (thermo-, or magnetoresistive bridges) and even
optical (waveguides, mirrors) applications.
Therefore we are also able to do complete wafer-processes for complex customer specific MST chips, usually consisting of several functional elements.
The wafer technology comprises
PVD (e-beam, sputtering)
standard process materials:
Ag, Au, Al, BiSb, Cr, CrSi, Cu, Fe, Ni, NiCr, NiFe, Pd, Pt, SiO2, SiON, Ta, TaN, Ti, TiW
others on request
PECVD:
SiNx, SiOx
lithography (b > 1µ)
dry etching (IBE, RIBE, RIE)
wet etching
Metallisation
mirrors
optical filters
heaters
electrodes
protection coatings
SiON-Microstructures
membranes / thermic isolation
actors
guidances
switches
holder for transition-electron-microscopy
V-grooves for optical components
wavegudes
cavities for Biomems
gas sensors
Inspection and final testing
100 % optical inspection eliminates:
surface failures
defects in structure geometry
passivation defects
small residues of metal on the surface
100 % electrical inspection
electrical test of special component features through the use of intelligent test chips
Technology example
The major foundry business at HL-Planartechnik GmbH is today made with the production of heat-flowsensors for the automotiv industry. The sensor-chip contains metallic heaters and thermoresistors forming well defined heat flow measuring units. To minimize the disturbing heat-exchange with the sourrounding material, both elements must be placed on a very thin silicon-nitride membrane.
HL-Planartechnik GmbH does the complete manufacturing of heat-flow sensor wafers including the ISO/TS conform characterization, testing and documentation.
Our customers ust the chips for mass flow-control and gas detection in all kinds of automotive engines, i.e. diesel- and hydrogen-engines.
HL-Planartechnik GmbH offers a wide range of products in planar microstructures for automotive, medical, household and industrial appliances since 1988. With services ranging from standard components up to a complete solution for customer specific tasks, we can offer the customer access to a whole range of microsystem technologies.
HL-Planartechik GmbH offers its MST technology process for building functional elements or blocks on wafers up to 6" size as foundry service. The elements may consist of silicon / siliconoxinitride and metallic microstructures.
The major foundry business at HL-Planartechnik GmbH is today made with the production of heat-flow sensors for the automotiv industry. The sensor-chip contains metallic heaters and thermoresistors forming well defined heat flow measuring units. To minimize the disturbing heat-exchange with the sourrounding material, both elements must be placed on a very thin silicon-nitride membrane.
