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台灣經貿網
晶圓技術開發服務Foundry Service


HL-Planartechnik GmbH offers a wide range of products in planar microstructures for automotive, medical, household and industrial appliances since 1988. With services ranging from standard components up to a complete solution for customer specific tasks, we can offer the customer access to a whole range of microsystem technologies.

HL-Planartechnik`s Foundry Service charter is to identify customized products and to obtain and refine the competence of the technology. In this way it is possible to develop and produce application specific products. The Foundry Service is based on our proven, standard MEMS technologies. Using our wafer technology with its micro-structured techniques, state-of-the-art equipment and production experience, HL-Planartechnik GmbH  can develop an individual solution for every customer.

  Applications
  • membranes
  • silicon structures
  • waveguides
  • cavities
  • mirrors
  • heaters
  • electrodes
  • protective coatings
  Your Benefits
  • individually developed and application specific products
  • qualified processes
  • complete documentation
  • high volume production
  • low cost
  Key Features
  • 4'' and 6'' wafer technology
  • professional process control & characterization
  • ISO/TS conforming production
 
Technology offer
HL-Planartechik GmbH offers its MST technology process for building functional elements or blocks on wafers up to 6" size as foundry service. The elements may consist of silicon / siliconoxinitride and metallic microstructures.

The functionality covers the whole range from

  • mechanical (i.e. switches, actors, guidances) to
  • electronical (thermo-, or magnetoresistive bridges) and even
  • optical (waveguides, mirrors) applications.
Therefore we are also able to do complete wafer-processes for complex customer specific MST chips, usually consisting of several functional elements.

 

  The wafer technology comprises
  • PVD (e-beam, sputtering)
    standard process materials:
    Ag, Au, Al, BiSb, Cr, CrSi, Cu, Fe, Ni, NiCr, NiFe, Pd, Pt, SiO2, SiON, Ta, TaN, Ti, TiW
    others on request
  • PECVD:
    SiNx, SiOx
  • lithography (b > 1µ)
  • dry etching (IBE, RIBE, RIE)
  • wet etching
  Metallisation
  • mirrors
  • optical filters
  • heaters
  • electrodes
  • protection coatings
  SiON-Microstructures
  • membranes / thermic isolation
  • actors
  • guidances
  • switches
  • holder for transition-electron-microscopy
  • V-grooves for optical components
  • wavegudes
  • cavities for Biomems
  • gas sensors
  Inspection and final testing
  • 100 % optical inspection eliminates:
    • surface failures
    • defects in structure geometry
    • passivation defects
    • small residues of metal on the surface
  • 100 % electrical inspection
  • electrical test of special component features through the use of intelligent test chips
Technology example

The major foundry business at HL-Planartechnik GmbH is today made with the production of heat-flow sensors for the automotiv industry. The sensor-chip contains metallic heaters and thermoresistors forming well defined heat flow measuring units. To minimize the disturbing heat-exchange with the sourrounding material, both elements must be placed on a very thin silicon-nitride membrane.


HL-Planartechnik GmbH does the complete manufacturing of heat-flow sensor wafers including the ISO/TS conform characterization, testing and documentation.

Our customers ust the chips for mass flow-control and gas detection in all kinds of automotive engines, i.e. diesel- and hydrogen-engines.

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地址:台北市長安東路二段171號4樓之3
Address:4F-3. No.171. Sec.2. Chang An.E.Rd. Taipei. Taiwan. R.O.C.
電話:(02)27111093~5
Tel:886-2-27111093~5
傳真:(02)27310902, 27764624
Fax:886-2-27310902,27764624


 



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TEL:886-2-2711-1093~5 FAX:886-2-2731-0902 ,2776-4624